Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact

di Cor Claeys (Autore)

Eddy Simoen (Autore)

Springer International Publishing AG, 2018

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

• Autore: Cor Claeys, Eddy Simoen
• Editore: Springer International Publishing AG
• Collana: Springer Series in Materials Science
• Anno: 2018
• Rilegatura: Hardback
• Pagine: 438 p.
• Dimensioni: 235 x 155 mm
• EAN: 9783319939247

Testo in English